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Recent salaries shared by Senior Process Engineer at MKS Instruments
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Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
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MKS Instruments pay FAQs
- The salary trajectory of a Senior Process Engineer ranges between locations and employers. The salary starts at $0 per year (estimate) and goes up to $0 per year (estimate) for the highest level of seniority.
- The estimated average salary for a Senior Process Engineer at MKS Instruments is $190,655 per year or $92 per hour, but some professionals have reported earning up to roughly $283,629 per year (90th percentile). The typical pay range is between $156,727 (25th percentile) and $235,727 (75th percentile) annually. This is based on 0 salaries submitted by MKS Instruments Senior Process Engineer professionals on Glassdoor, as of Jul 2026.